Contactless Single Cell Extraction from Monolayer Cell Culture Using A MEMS Acoustic Droplet Ejector.

Objective: To achieve a contactless and damage-less extraction of a single (or a few) human retinal pigment epithelial (RPE) cell(s) from a cell monolayer with acoustic droplet ejection.

Methods: An acoustic droplet ejector based on a self-focusing acoustic transducer (SFAT) is designed, microfabricated, and placed on a precision movable stage that aligns it to the targeted cell(s) in a Petri dish. The device delivers 20.

MEMS piezoelectric resonant microphone array for lung sound classification.

This paper reports a highly sensitive piezoelectric microelectromechanical systems (MEMS) resonant microphone array (RMA) for detection and classification of wheezing in lung sounds. The RMA is composed of eight width-stepped cantilever resonant microphones with Mel-distributed resonance frequencies from 230 to 630 Hz, the main frequency range of wheezing. At the resonance frequencies, the unamplified sensitivities of the microphones in the RMA are between 86 and 265 mV Pa, while the signal-to-noise ratios (SNRs) for 1 Pa sound pressure are between 86.

Simple sacrificial-layer-free microfabrication processes for air-cavity Fresnel acoustic lenses (ACFALs) with improved focusing performance.

Focused ultrasound (FUS) is a powerful tool widely used in biomedical therapy and imaging as well as in sensors and actuators. Conventional focusing techniques based on curved surfaces, metamaterial structures, and multielement phased arrays either present difficulties in massively parallel manufacturing with high precision or require complex drive electronics to operate. These difficulties have been addressed by microfabricated self-focusing acoustic transducers (SFATs) with Parylene air-cavity Fresnel acoustic lenses (ACFALs), which require a time-demanding step in removing the sacrificial layer.

Patch Clamp Technology for Focused Ultrasonic (FUS) Neuromodulation.

Electrical stimulation of neural tissue, such as deep brain stimulation (DBS) and cortical stimulation, is widely applied therapeutic neuromodulation techniques for neurologic disorders. Penetrating electrodes (e.g.

Active Noise Cancellation with MEMS Resonant Microphone Array.

This paper presents active noise cancelation (ANC) based on MEMS resonant microphone array (RMA) which offers very high sensitivities (and thus very low noise floors) near resonance frequencies and also provides filtering in acoustic domain. The ANC is targeted to actively cancel out any sound between 5 - 9 kHz (above the speech range of 300 - 3,400 Hz). The ANC works best around the resonance frequencies of the resonant microphones where the sensitivities are high.

Ring-Focusing Fresnel Acoustic Lens for Long Depth-of-Focus Focused Ultrasound with Multiple Trapping Zones.

This paper describes a novel acoustic transducer with dual functionality based on 1-mm-thick lead zirconate titanate (PZT) substrate with a modified air-cavity Fresnel acoustic lens on top. Designed to let ultrasound waves focus over an annular ring region, the lens generates a long depth-of-focus Bessel-like focal beam and multiple trapping zones based on quasi-Airy beams and bottle beams. With 2.

Non-Thermal, Selective Cancer Treatment With High-Frequency Medium-Intensity Focused Ultrasound.

Focused ultrasound (FUS) has proven its efficacy in non-invasive, radiation-free cancer treatment. However, the commonly used low-frequency high-intensity focused ultrasound (HIFU) destroys both cancerous and healthy tissues non-specifically through extreme heat and inertial cavitation with low spatial resolution. To address this issue, we evaluate the therapeutic effects of pulsed (60 Hz pulse repetition frequency, 1.

Carbon Nanotube Macroelectronics for Active Matrix Polymer-Dispersed Liquid Crystal Displays.

Active matrix liquid crystal display (AMLCD) is the most widely used display technology nowadays. Transparent display is one of the emerging technologies to provide people with more features such as displaying images on transparent substrates and simultaneously enabling people to see the scenery behind the panel. Polymer-dispersed liquid crystal (PDLC) is a possible active matrix transparent display technology due to its high transparency, good visibility, and low power consumption.

Mass spectrometric sampling of a liquid surface by nanoliter droplet generation from bursting bubbles and focused acoustic pulses: application to studies of interfacial chemistry.

The complex chemistry occurring at the interface between liquid and vapor phases contributes significantly to the dynamics and evolution of numerous chemical systems of interest, ranging from damage to the human lung surfactant layer to the aging of atmospheric aerosols. This work presents two methodologies to eject droplets from a liquid water surface and analyze them via mass spectrometry. In bursting bubble ionization (BBI), droplet ejection is achieved via the formation of a jet following bubble rupture at the surface of a liquid to yield 250 μm diameter droplets (10 nL volume).

Peptide synthesis on glass substrate using acoustic droplet ejector.

This paper describes the synthesis of a 9-mers-long peptide ladder structure of glycine on a modified glass surface using a nanoliter droplet ejector. To synthesize peptide on a glass substrate, SPOT peptide synthesis protocol was followed with a nozzleless acoustic droplet ejector being used to eject about 300 droplets of preactivated amino acid solution to dispense 60 nL of the solution per mer. The coupling efficiency of each mer was measured with FITC fluorescent tag to be 96%, resulting in net 70% efficiency for the whole 9-mer-long peptide of glycine.

Ultrahigh frequency lensless ultrasonic transducers for acoustic tweezers application.

Similar to optical tweezers, a tightly focused ultrasound microbeam is needed to manipulate microparticles in acoustic tweezers. The development of highly sensitive ultrahigh frequency ultrasonic transducers is crucial for trapping particles or cells with a size of a few microns. As an extra lens would cause excessive attenuation at ultrahigh frequencies, two types of 200-MHz lensless transducer design were developed as an ultrasound microbeam device for acoustic tweezers application.

Microparticle trapping in an ultrasonic Bessel beam.

This paper describes an acoustic trap consisting of a multi-foci Fresnel lens on 127 μm thick lead zirconate titanate sheet. The multi-foci Fresnel lens was designed to have similar working mechanism to an Axicon lens and generates an acoustic Bessel beam, and has negative axial radiation force capable of trapping one or more microparticle(s). The fabricated acoustic tweezers trapped lipid particles ranging in diameter from 50 to 200 μm and microspheres ranging in diameter from 70 to 90 μm at a distance of 2 to 5 mm from the tweezers without any contact between the transducer and microparticles.

Piezoelectric microelectromechanical resonant sensors for chemical and biological detection.

Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their excellent mass resolution, have been studied for many applications, including DNA hybridization, protein-ligand interactions, and immunosensor development. They have also been explored for detecting antigens, organic gas, toxic ions, and explosives. Most piezoelectric MEMS resonant sensors are acoustic sensors (with specific coating layers) that enable selective and label-free detection of biological events in real time.

Miniature high-frequency longitudinal wave mass sensors in liquid.

In this paper, micromachined longitudinal wave resonant mass sensors operating near 1 GHz in a liquid environment are investigated and characterized. Mass sensitivities of the film bulk acoustic resonator (FBAR) and high-tone bulk acoustic resonator (HBAR) microbalances with small size are measured to be 782.7 cm(2)/g (50 times larger than that of conventional bulky quartz crystal microbalance) and 9.

High-overtone self-focusing acoustic transducers for high-frequency ultrasonic Doppler.

This work reports the potential use of high-overtone self-focusing acoustic transducers for high-frequency ultrasonic Doppler. By using harmonic frequencies of a thick bulk Lead Zirconate Titanate (PZT) transducer with a novel air-reflector Fresnel lens, we obtained strong ultrasound signals at 60 MHz (3rd harmonic) and 100 MHz (5th harmonic). Both experimental and theoretical analysis has demonstrated that the transducers can be applied to Doppler systems with high frequencies up to 100 MHz.

HBAR-based 3.6 GHz oscillator with low power consumption and low phase noise.

We have designed and built 2 oscillators at 1.2 and 3.6 GHz based on high-overtone bulk acoustic resonators (HBARs) for application in chip-scale atomic clocks (CSACs).

Performance of a diaphragmed microlens for a packaged microspectrometer.

This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M(2) value of the microlens.

Ultra temperature-stable bulk-acoustic-wave resonators with SiO2 compensation layer.

This paper describes temperature compensated bulk acoustic-wave resonators (BAR) with temperature coefficient of frequency (TCF) less than 1 ppm/degrees C at above 3 GHz. The temperature compensation is produced from the unique physical property of silicon dioxide's positive TCF, unlike most other materials that have negative TCF. Two types of resonators have been explored: film bulk acoustic resonator (FBAR) composed of Al/ZnO/Al/SiO2 on a surface micromachined cantilever that is released by XeF2 vapor etching and high-overtone acoustic resonator (HBAR) composed of an Al/ZnO/Al resonator on a bulk micromachined SiO2/Si/SiO2 supporting substrate.

Mercuric ion sensing by a film bulk acoustic resonator.

This paper describes a film bulk acoustic resonator (FBAR) mass sensor for detecting Hg2+ ion in water with excellent sensitivity and selectivity. When a thin Au film was deposited on the surface of an FBAR, the resonant frequency shifted to a lower value when the film was exposed to Hg2+ in aqueous solution. The FBAR sensor detected as low as 10(-9) M Hg2+ (0.

Implantable biaxial piezoresistive accelerometer for sensorimotor control.

This paper describes the design, fabrication and test results of a novel biaxial piezoresistive accelerometer and its incorporation into a miniature neuromuscular stimulator called a BION. Because of its highly symmetric twin mass structure, the X and Z axis acceleration can be measured at the same time and the cross axis sensitivity can be minimized by proper piezoresistor design. The X and Z axis sensitivities of the biaxial accelerometer are 0.

Micromachined acoustic wave resonator isolated from substrate.

This paper describes high Q, free-standing, narrow beam supported film bulk acoustic-wave resonators (FBARs) fabricated with silicon micromachining. The resonators are composed of metal/ZnO/metal/Si(x)Ny (or metal/ZnO/metal) composite layers, which are suspended by narrow Si(x)Ny/metal (or metal) beams to minimize energy leakage to the substrate. A layer of 0.

Chembio extraction on a chip by nanoliter droplet ejection.

This paper describes a novel liquid separation technique for chembio extraction by an ultrasonic nanoliter-liquid-droplet ejector built on a PZT sheet. This technique extracts material from an aqueous two-phase system (ATPS) in a precise amount through digital control of the number of nanoliter droplets, without any mixing between the two liquids in the ATPS. The ultrasonic droplet ejector uses an acoustic streaming effect produced by an acoustic beam focused on the liquid surface, and ejects liquid droplets only from the liquid surface without disturbing most of the liquid below the surface.